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Related Concept Videos

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Related Experiment Video

Updated: Jul 26, 2026

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Designing transmitting CMUT cells for airborne applications.

Aslı Unlügedik, A Taşdelen, Abdullah Atalar

    IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    |November 13, 2014
    PubMed
    Summary

    We introduce a novel airborne operation for capacitive micromachined ultrasonic transducers (CMUTs), enabling plate motion without collapse. This advancement achieves a 78.9 dB source level at 73.7 kHz, enhancing ultrasonic transducer performance.

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    Area of Science:

    • MEMS/NEMS
    • Acoustics
    • Transducer Technology

    Background:

    • Capacitive micromachined ultrasonic transducers (CMUTs) traditionally require DC bias for airborne operation.
    • Plate collapse and nonlinearities limit CMUT performance in airborne applications.

    Purpose of the Study:

    • To report a new mode of airborne CMUT operation without DC bias.
    • To establish design fundamentals for this new operational mode.
    • To investigate performance limits and nonlinear interactions.

    Main Methods:

    • Development of equivalent-circuit-based design principles for airborne CMUTs.
    • Fabrication and experimental testing of CMUT cells.
    • Analysis of nonlinear transduction forces and plate compliance.

    Main Results:

    • Demonstration of a novel airborne CMUT mode with full gap plate motion.
    • Achieved source level of 78.9 dB//20 μPa@1 m at 73.7 kHz.
    • Measured quality factor of 120 with a 2.05 mm radius CMUT cell.

    Conclusions:

    • The new airborne CMUT mode offers improved performance without DC bias.
    • Design fundamentals are verified, enabling optimized CMUT cell development.
    • Understanding nonlinearities is crucial for further performance enhancement.