Design and fabrication of field-effect biosensors for biochemical detection

Biochemically sensitive field-effect sensors are fabricated with simplified chip technology. Its fabrication process flow is designed based on metal gate complementary metal-oxide semiconductor technology, in which only six pattern masks are employed. The sensors are measured as field modulation resistors since they are made in its depletion mode. The milliampere magnitude response of conducting currents from certain biochemical materials achieves distinct sensitivity when measured on our fabricated sensors with different sensitive areas of W/L = 4.2 and 20.0. To check the stability of the sensor, up to 20 repeated tests are conducted on the same sensor chip operated in its three states, in which no materials (blank state, called 'blank'), pure water and biochemical materials are coated on its gate dielectric film, respectively. Measured results show that the response currents for certain materials are distributed in certain current range. Taking the response current of blank as a reference value, the response current of pure water is positive but very close to that of blank because of the small electric dipole properties of pure water. However, the response current of biochemical materials are negative and far apart from that of blank, because the biochemical materials have large electric dipole properties and clearly show measurement resolution.