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Electron imaging with an EBSD detector.

Stuart I Wright1, Matthew M Nowell1, René de Kloe2

  • 1EDAX, 392 East 12300 South, Suite H, Draper, UT 84020, USA.

Ultramicroscopy
|December 3, 2014
PubMed
Summary
This summary is machine-generated.

Electron Backscatter Diffraction (EBSD) can now create high-speed images using its detector, offering topographic and orientation contrast. This advancement allows for faster microstructure characterization in scanning electron microscopy (SEM).

Keywords:
EBSDElectron imagingPRIASSynthetic-BSDVirtual FSD

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Area of Science:

  • Materials Science
  • Microscopy
  • Crystallography

Background:

  • Electron Backscatter Diffraction (EBSD) is a key technique for analyzing crystallographic orientation in microstructures within scanning electron microscopes (SEM).
  • Traditional EBSD analysis involves pattern indexing, which can be time-consuming.

Purpose of the Study:

  • To explore the use of the EBSD detector as a high-speed imaging device.
  • To enable faster acquisition of microstructure images with topographic and orientation contrast.

Main Methods:

  • Utilizing high-speed digital cameras with extreme binning (5x5 pixel patterns) for EBSD data acquisition.
  • Employing the EBSD detector as an imaging device without pattern indexing.
  • Forming images from a 5x5 array of pixels, each acting as a scattered electron detector.

Main Results:

  • High-speed image acquisition rates comparable to conventional SEM imaging are achievable.
  • Images with topographic, atomic density, and orientation contrast can be generated.
  • Image data can be acquired during scans or post-processed from existing EBSD patterns.

Conclusions:

  • The EBSD detector can function as an effective imaging device for rapid microstructure visualization.
  • This method facilitates correlative analysis with traditional EBSD orientation data and X-Ray Energy Dispersive Spectroscopy (XEDS) chemical data.