Enhanced quantification for 3D SEM-EDS: using the full set of available X-ray lines

Area of Science:

• Materials Science
• Analytical Chemistry
• Microscopy

Background:

• Quantitative analysis of 3D SEM-EDS data is crucial for materials characterization.
• Previous methods for 3D SEM-EDS quantification have limitations in utilizing all spectral information.
• Energy dispersive X-ray spectroscopy (EDS) generates X-ray lines of varying energies, offering different analytical sensitivities.

Purpose of the Study:

• To extend a previously developed method for 3D SEM-EDS quantification.
• To incorporate all available X-ray lines, including high and low energy ones, for improved analysis.
• To enhance compositional accuracy and spatial resolution in 3D elemental mapping.

Main Methods:

• Extension of an existing 3D SEM-EDS quantification algorithm.
• Utilizing all generated X-ray lines (high and soft energy) for analysis.
• Acquisition of data using a dual beam FIB/SEM on a multi-element Ni-based superalloy at high accelerating voltage.

Main Results:

• Demonstrated improved compositional quantification compared to previous methods.
• Achieved enhanced spatial resolution in the 3D elemental maps.
• Showcased the benefit of using both high-energy (more accurate) and soft X-ray (surface-sensitive) lines.

Conclusions:

• The extended 3D SEM-EDS quantification method provides superior analytical performance.
• Utilizing the full spectrum of X-ray lines significantly benefits elemental analysis in 3D.
• This advancement offers more precise and detailed microstructural and compositional information for materials.