A high-performance LC wireless passive pressure sensor fabricated using low-temperature co-fired ceramic (LTCC)...

Area of Science:

• Sensor technology
• Materials science

Background:

• Traditional pressure sensors face challenges in harsh environments and high temperatures.
• Resonant sensors offer potential for high sensitivity but require robust designs.

Purpose of the Study:

• To develop an LC resonant pressure sensor with improved performance and stability.
• To enhance sensor durability and reduce resonant-frequency drift in high-temperature conditions.

Main Methods:

• Designed a sensor with a buried structure to protect electrical components.
• Optimized the pressure-sensitive membrane using small-deflection-plate theory.
• Fabricated the sensor using low-temperature co-fired ceramic (LTCC) technology with a fugitive film for a sealed cavity.

Main Results:

• The sensor exhibits low frequency drift of approximately 0.75 kHz/°C with temperature variations.
• Achieved high responsivity up to 31 kHz/bar within the 0-60 bar pressure range.
• The buried structure effectively protected components and reduced drift in high temperatures.

Conclusions:

• The developed LC resonant pressure sensor offers improved performance, stability, and durability.
• LTCC fabrication and buried structure design are effective for high-pressure and high-temperature sensing applications.
• The sensor is a promising candidate for demanding industrial and scientific applications.