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Spatial-phase-shift imaging interferometry using a spectrally modulated white light source.

Shlomi Epshtein, Alon Harris, Igor Yaacobovitz

|December 16, 2014

Summary

This summary is machine-generated.

This study introduces an advanced white light spatial-phase-shift (WLSPS) technique for precise object surface measurements. The method eliminates the need for a reference beam, enabling accurate topography acquisition even in the presence of vibrations.

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Area of Science:

Optical Metrology
Surface Characterization
Interferometry

Background:

Traditional white light spatial-phase-shift (WLSPS) methods often require a reference beam for surface measurements.
Vibrations can significantly impact the accuracy of conventional surface topography acquisition.
Existing techniques may necessitate continuous phase delay for obtaining interferograms.

Purpose of the Study:

To describe an extension of the WLSPS technique for object surface measurements.
To enable surface measurements from real object images without a reference beam.
To achieve inherent vibration cancellation during surface topography acquisition.

Main Methods:

Utilizing an extended white light spatial-phase-shift (WLSPS) approach.
Acquiring multiple images of an object illuminated by a spectrally modulated white light source.
Applying an appropriate algorithm for surface topography reconstruction.

Main Results:

Surface measurements are obtainable from any real object image.
The method inherently cancels vibrations, improving measurement robustness.
Spectrally modulated light obviates the need for continuous phase delay.

Conclusions:

The extended WLSPS technique offers a robust and accurate method for surface topography measurement.
This approach simplifies the measurement setup by removing the requirement for a reference beam.
The inherent vibration cancellation makes it suitable for real-world applications where environmental stability is a concern.