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Large displacement vertical translational actuator based on piezoelectric thin films
Zhen Qiu1, Jeffrey S Pulskamp2, Xianke Lin3
1Department of Biomedical Engineering, University of Michigan, 2200 Bonisteel Dr., Ann Arbor, MI 48109-2099, USA.
Journal of Micromechanics and Microengineering : Structures, Devices, and Systems
|December 16, 2014
Summary
A new vertical microactuator uses lead-zirconate-titanate (PZT) thin films for precise motion. This piezoelectric device achieves large displacements, suitable for optical applications like endoscopic microscopy.
Area of Science:
- Materials Science
- Mechanical Engineering
- Nanotechnology
Background:
- Developing microactuators for precise motion control is crucial for advanced applications.
- Thin-film piezoelectric materials offer potential for compact and efficient actuation.
Purpose of the Study:
- To present a novel vertical translational microactuator.
- To characterize its performance using lead-zirconate-titanate (PZT) thin films.
- To model its nonlinear behavior.
Main Methods:
- Utilizing four compound bend-up/bend-down unimorphs for translational motion.
- Employing chemical-solution deposited PZT thin films as the actuation material.
- Developing analytical models to describe static and dynamic behavior.
Main Results:
- Achieved static displacements up to 120 μm, typically 80-90 μm.
- Observed system resonance at 200 Hz.
- Demonstrated accurate modeling of nonlinear behavior based on voltage-dependent piezoelectric coefficients.
Conclusions:
- The developed microactuator offers large displacement and high bandwidth at low voltage and power.
- Its performance makes it suitable for various optical applications, including endoscopic microscopy.
- The analytical models accurately predict device behavior, aiding future design optimization.
