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Updated: Apr 14, 2026

Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers
Published on: February 8, 2022
1Nanodevices and Integrated Systems Laboratory, Department of Electrical and Computer Engineering, University of Massachusetts, Amherst, MA 01003, USA.
Nanoimprint lithography (NIL) has evolved significantly over 20 years, overcoming fabrication challenges and industrial adoption hurdles. Advancements like roll-to-roll processing enhance its potential for future commercial applications.
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