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Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors
Takumi Goto1, Hiroki Nakamori1, Takashi Kimura2
1Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.
The Review of Scientific Instruments
|May 3, 2015
Summary
An adaptive Kirkpatrick-Baez mirror system was developed for precise X-ray focusing. This system achieved a sub-100 nm focal spot size using deformable mirrors and advanced metrology.
Area of Science:
- Optics and X-ray instrumentation
- Materials science and engineering
Background:
- High-resolution X-ray focusing is crucial for advanced scientific imaging.
- Existing Kirkpatrick-Baez mirror systems face limitations in precise shape control.
Purpose of the Study:
- To develop and demonstrate an adaptive Kirkpatrick-Baez mirror focusing system.
- To achieve precise control over mirror shape for enhanced focusing performance.
Main Methods:
- Construction of an adaptive Kirkpatrick-Baez optics using piezoelectric deformable mirrors at SPring-8.
- Utilizing the pencil-beam method for at-wavelength figure metrology to determine mirror shapes.
- Applying controlled voltages to correct shape errors with high accuracy.
Main Results:
- Mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm.
- Achieved a focused X-ray beam with an intensity profile of 110 × 65 nm (Full Width at Half Maximum).
- Demonstrated effective focusing performance at 10 keV X-ray energy.
Conclusions:
- The adaptive Kirkpatrick-Baez mirror system enables precise X-ray focusing.
- The developed system significantly improves focusing capabilities for X-ray applications.
- This technology advances the potential for nanoscale X-ray imaging and analysis.
