Laboratory-based X-ray reflectometer for multilayer characterization in the 15-150 keV energy band

Area of Science:

• Materials Science
• Optics and Photonics
• X-ray Instrumentation

Background:

• Hard X-ray multilayer coatings are critical for various applications, including optics and scientific instruments.
• Accurate characterization of these coatings at operational conditions is essential for performance validation.

Purpose of the Study:

• To develop and present a laboratory-based X-ray reflectometer for measuring hard X-ray multilayer coating performance.
• To enable characterization at specific X-ray energies and incidence angles relevant to operational use.

Main Methods:

• Utilized a sealed-tube X-ray source (15-150 keV) with adjustable slits for a low-divergence beam.
• Employed a high-resolution goniometer and motorized stages for precise sample and detector positioning.
• Used a CdTe energy-sensitive detector and multi-channel analyzer to compute absolute reflectance from incident and reflected spectra.

Main Results:

• Successfully designed, constructed, and operated a versatile X-ray reflectometer.
• Demonstrated the instrument's capability to measure both periodic, narrow-band and depth-graded, wide-band multilayer coatings.
• Provided example results validating the performance measurement capabilities.

Conclusions:

• The developed X-ray reflectometer provides a reliable method for evaluating hard X-ray multilayer coatings.
• The instrument's design allows for precise characterization under operational conditions.
• This tool is valuable for advancing the development and application of high-performance multilayer coatings.