Study of Carbon Nanotubes as Etching Masks and Related Applications in the Surface Modification of GaAs-based

Yuanhao Jin1,2, Qunqing Li1,2, Mo Chen1,2

  • 1State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics & Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing, 100084, China.

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