A Simple Metric for Determining Resolution in Optical, Ion, and Electron Microscope Images

Area of Science:

• Microscopy
• Image Analysis
• Materials Science

Background:

• Accurate resolution assessment is crucial for interpreting microscopy data.
• Existing methods can be tool-dependent and lack standardization.
• A universal metric is needed for reliable image quality evaluation.

Purpose of the Study:

• To introduce a novel, universally applicable resolution metric for spatially calibrated images.
• To provide a standardized, vendor-neutral method for assessing image resolution.
• To enable quantitative comparison of resolution across diverse imaging modalities.

Main Methods:

• Developed a metric based on fitting a sigmoidal function to pixel intensities across light-dark edges.
• Determined the characteristic distance of light-dark transitions.
• Calibrated the metric using scanning transmission electron microscope (STEM) images of Silicon (Si).

Main Results:

• The metric successfully quantifies resolution for optical, scanning electron microscope (SEM), and helium ion microscope (HIM) images.
• The method provides quantitative, reproducible resolution values.
• Demonstrated a consistent framework for evaluating resolution across different microscopes.

Conclusions:

• The proposed metric offers a robust and self-consistent approach to image resolution analysis.
• This tool facilitates objective comparison of image quality from various microscopy vendors and types.
• Enables end-users to independently verify and compare microscope performance.