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New fabrication technique for highly sensitive qPlus sensor with well-defined spring constant.

Hatem Labidi¹, Martin Kupsta², Taleana Huff¹

¹Department of Physics, University of Alberta, Edmonton, AB, Canada, T6G 2J1; National Institute for Nanotechnology, National Research Council of Canada, Edmonton, AB, Canada, T6G 2M9.

Ultramicroscopy

|June 29, 2015

Summary

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A novel qPlus sensor fabricated using focused ion beam technology offers enhanced sensitivity for atomic force microscopy (AFM). This stable, precise sensor enables high-resolution atomic imaging at low temperatures.

Area of Science:

Materials Science
Nanotechnology
Surface Science

Background:

Atomic Force Microscopy (AFM) requires highly sensitive sensors for precise surface analysis.
Existing qPlus sensors face limitations in sensitivity and quantitative measurement accuracy.

Purpose of the Study:

To develop a new fabrication technique for highly sensitive qPlus sensors.
To enhance the force gradient sensitivity and quantitative capabilities of AFM sensors.

Main Methods:

Utilized focused ion beam (FIB) milling and welding.
Fabricated a sharp micro-tip from tungsten wire and attached it to a quartz tuning fork.
Tested sensor stability and performance under ultra-high vacuum (UHV) conditions.

Main Results:

Keywords:

Atomic force microscopy Focused ion beam QPlus sensor Quantitative AFM Scanning probe microscopy Spring constant

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The fabricated qPlus sensor demonstrated high resonance frequency and quality factor.
Achieved increased force gradient sensitivity and precise spring constant determination.
The sensor proved stable under UHV tip cleaning and in situ treatments.
Preliminary atomic resolution imaging of Si(111)-7×7 surface at 4.5 K was successful using AFM and Scanning Tunneling Microscopy (STM).

Conclusions:

The FIB-based fabrication method yields highly sensitive and stable qPlus sensors.
This advancement facilitates accurate quantitative AFM measurements and high-resolution surface imaging.
The new sensor design opens possibilities for advanced nanoscale investigations.