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Scanning reflection ion microscopy in a helium ion microscope.

Yuri V Petrov1, Oleg F Vyvenko2

  • 1Interdisciplinary Resource Center for Nanotechnology, Saint-Petersburg State University, Ulyanovskaya 1, Saint-Petersburg 198504, Russia.

Beilstein Journal of Nanotechnology
|July 15, 2015
PubMed
Summary

Reflection ion microscopy (RIM) in a helium ion microscope (HIM) offers high-resolution surface imaging. This technique visualizes surface morphology, not atomic composition, with a minimum detectable step height of 5 nm.

Keywords:
helium ion microscopelow-angle ion scatteringreflection microscopysurface imagingsurface morphology

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