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Updated: Apr 4, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Stuart I Wright1, Matthew M Nowell1, Scott P Lindeman1
1EDAX, 392 East 12300 South, Suite H, Draper, UT 84020, USA.
Electron Backscatter Diffraction (EBSD) data quality can be improved using new post-processing methods. Local pattern averaging offers the most significant enhancement for noisy EBSD patterns, particularly those from camera issues.
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