The Oxidation Behaviour of Diamond Like Carbon for Phase-Change Probe Memory Application

Phase-change probe memory, as a promising candidate for next-generation storage device, usually requires a capping layer to protect phase-change media from wear and corrosion. Diamond-like carbon film has been commonly used for capping layer due to its high mechanical hardness and easiness for tailoring physical properties. However, the possibility for such carbon thin film to react to surrounding oxygen when subjected to Joule heating during the recording process of phase-change probe memory is rarely investigated before from both experimental and simulation point of view. Therefore, a novel carbon oxidation model was developed to mimic the chemical reaction of carbon film to the surrounding oxygen in terms of the degradation of layer thickness. Results obtained from this model are in a good agreement with the experimental counterpart, indicating the physical reality of this proposed model.