High-Temperature Corrosion of Nano-Multilayered TiAISiN Thin Films in Ar-0.2%SO2 Gases

Nano-multilayered TiAlSiN films with a composition of 26Ti-16.3Al-1.2Si-56.5N (at.%) were deposited onto steel via arc ion plating, and corroded at 800-900 °C for 30 h in Ar-0.2%SO2 gases. The films were corrosion resistant, because the oxidation process dominated sulfidation. The scales consisted primarily of Al2O3 and TiO2, where a small amount of Si dissolved.