Structure of n-Alkyltrichlorosilane Monolayers on Si(100)/SiO2

H-G Steinrück1,2, J Will1, A Magerl3

  • 1Crystallography and Structural Physics, Friedrich-Alexander-Universität Erlangen-Nürnberg , 91058 Erlangen, Germany.

Summary

Self-assembled monolayers (SAMs) of n-alkyltrichlorosilanes on silicon show crystalline domains but limited lateral order. Strain from spacing mismatches restricts domain size and order in these alkyl silane SAMs.