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Ge microdisk with lithographically-tunable strain using CMOS-compatible process.

David S Sukhdeo, Jan Petykiewicz, Shashank Gupta

    Optics Express
    |February 3, 2016
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    Summary
    This summary is machine-generated.

    We developed germanium microdisk optical resonators with tunable bandgaps using biaxial tensile strain. This breakthrough enables efficient germanium light sources for on-chip optical interconnects.

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    Area of Science:

    • Materials Science
    • Optoelectronics
    • Nanotechnology

    Background:

    • Germanium (Ge) is a promising material for optoelectronics due to its compatibility with silicon complementary metal-oxide-semiconductor (CMOS) technology.
    • Efficient light sources are crucial for the development of on-chip optical interconnects.

    Purpose of the Study:

    • To demonstrate germanium microdisk optical resonators with tunable bandgaps.
    • To achieve a homogeneous strain distribution in germanium microdisks for enhanced optical properties.
    • To present a pathway towards efficient germanium-based light sources for integrated photonics.

    Main Methods:

    • Fabrication of germanium microdisk optical resonators using a CMOS-compatible process.
    • Application of a stress concentration technique to achieve large biaxial tensile strain (~0.7%).
    • Compensation of strain relaxation using a compressively stressed silicon nitride layer.
    • Characterization using two-dimensional Raman spectroscopy and finite-element method (FEM) simulations.
    • Optical performance evaluation through photoluminescence (PL) measurements and finite-difference time-domain (FDTD) simulations.

    Main Results:

    • Successful fabrication of germanium microdisks with significant biaxial tensile strain.
    • Homogeneous strain distribution confirmed by Raman spectroscopy and FEM simulations.
    • Observation of clear optical resonances attributed to whispering gallery modes (WGMs).
    • Good agreement between experimental results and FDTD optical simulations.
    • Demonstration of bandgap tunability in germanium microdisks.

    Conclusions:

    • The developed technique allows for precise control over strain in germanium microdisks.
    • The strain engineering approach leads to efficient light emission from germanium.
    • These bandgap-customizable microdisks offer a novel route for creating efficient germanium light sources for on-chip optical interconnects.