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Enhancing one dimensional sensitivity with plasmonic coupling: erratum
Optics Express
|February 25, 2016
Summary
Converged rigorous coupled wave approximation (RCWA) simulations corrected plasmonic enhancement descriptions in ellipsometric test structures. This study presents accurate minima locations, resolving previous simulation inaccuracies.
Area of Science:
- Plasmonics
- Optical Metrology
- Computational Electromagnetics
Context:
- Rigorous Coupled Wave Approximation (RCWA) simulations are crucial for optical metrology.
- Previous simulations suffered from unconverged results, leading to inaccurate minima location descriptions.
- Plasmonic enhancement is a key principle in advanced ellipsometric test structures.
Purpose:
- To present converged RCWA simulations.
- To correct the description of minima locations in plasmonic enhancement.
- To ensure accurate modeling of ellipsometric test structures.
Summary:
- This work provides corrected data from converged rigorous coupled wave approximation (RCWA) simulations.
- The corrected simulations accurately describe the behavior of minima locations.
- The fundamental principle of plasmonic enhancement in ellipsometric test structures is validated.
Impact:
- Ensures accurate theoretical predictions for plasmonic-enhanced ellipsometric sensors.
- Improves the reliability of optical metrology using RCWA.
- Facilitates the design and interpretation of experiments involving plasmonic nanostructures.
