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Assessing strain mapping by electron backscatter diffraction and confocal Raman microscopy using wedge-indented Si.

Lawrence H Friedman1, Mark D Vaudin1, Stephan J Stranick1

  • 1Materials Measurement Science Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.

Ultramicroscopy
|March 4, 2016
PubMed
Summary
This summary is machine-generated.

Electron backscatter diffraction (EBSD) accurately maps small-scale strain fields, while confocal Raman microscopy (CRM) shows similar precision but lower accuracy. Both techniques are validated against finite element analysis (FEA) models for indentation deformation.

Keywords:
AFMConfocal Raman MicroscopyEBSDFEAIndentationStrain

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Solid Mechanics

Background:

  • Accurate small-scale strain mapping is crucial for understanding material behavior under stress.
  • Electron backscatter diffraction (EBSD) and confocal Raman microscopy (CRM) are advanced techniques for microstructural analysis.
  • Quantifying the precision and accuracy of these methods is essential for reliable experimental data.

Purpose of the Study:

  • To assess the accuracy of EBSD and CRM for small-scale strain mapping.
  • To compare experimental measurements with finite element analysis (FEA) models.
  • To evaluate the influence of depth-varying strain fields on measurement accuracy.

Main Methods:

  • Utilized a wedge indentation in silicon (Si) as a test case for multi-axial strain fields.
  • Employed atomic force microscopy (AFM) to measure the near-indentation surface profile for FEA model adaptation.
  • Performed direct experimental comparisons and FEA-modeled comparisons of strain and deformation data.

Main Results:

  • EBSD accurately assessed the indentation deformation field to within the measurement precision of approximately 2x10(-4) strain.
  • CRM demonstrated similar precision but was limited to several times the strain value for accuracy.
  • Convolution effects in depth-varying strain fields were considered for both EBSD and CRM.

Conclusions:

  • EBSD provides a highly accurate method for small-scale strain mapping in materials.
  • CRM is precise but has limitations in accuracy compared to EBSD for this application.
  • FEA modeling, adapted with AFM surface data, serves as a valuable tool for validating strain measurement techniques.