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Updated: Mar 20, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

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Published on: July 5, 2016

Geometric phase shifting digital holography.

Boaz Jessie Jackin, C S Narayanamurthy, Toyohiko Yatagai

|June 1, 2016

Summary

This summary is machine-generated.

A novel digital holographic technique utilizes geometric phase for 3D object measurement. This method offers advantages over traditional phase shifting techniques for transparent and reflecting surfaces.

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Area of Science:

Optics and Photonics
Metrology
Digital Holography

Background:

Traditional phase shifting digital holography often relies on dynamic phase, which is sensitive to optical path length and wavelength.
Accurate measurement of three-dimensional (3D) objects, especially transparent and reflecting ones, remains a challenge in metrology.

Purpose of the Study:

To propose and demonstrate a new phase shifting digital holographic technique based on geometric phase.
To overcome the limitations of dynamic phase in holographic measurements.
To enable precise holographic measurement of transparent and reflecting 3D objects.

Main Methods:

Implementation of a purely geometric phase in a Michelson interferometric geometry.
Utilizing a rotating wave plate to control the amount of geometric phase generated.
Applying the technique for surface shape measurement and 3D object imaging.

Main Results:

The proposed geometric phase method is independent of optical path length and wavelength.
Controllable geometric phase generation was achieved using a rotating wave plate.
Successful experimental demonstration of surface shape measurement and 3D object imaging.

Conclusions:

The novel geometric phase shifting digital holographic technique offers unique advantages for 3D object measurement.
This method provides a robust and controllable approach for holographic metrology.
The technique is particularly beneficial for characterizing transparent and reflecting surfaces.