Search research articles

ABOUT JoVE

Overview Leadership Blog JoVE Help Center

AUTHORS

Publishing Process Editorial Board Scope & Policies Peer Review FAQ Submit

LIBRARIANS

Testimonials Subscriptions Access Resources Library Advisory Board FAQ

RESEARCH

JoVE Journal Methods Collections JoVE Encyclopedia of Experiments Archive

EDUCATION

JoVE Core JoVE Business JoVE Science Education JoVE Lab Manual Faculty Resource Center Faculty Site

Terms & Conditions of Use

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by

Same author

High-flux, moderate-bandwidth, high-energy X-rays from lapped Si(111) crystals in a double-crystal monochromator.

Journal of synchrotron radiation·2026

Same author

Wavelength-angle characterization of high-energy X-ray beams from lapped Si(111) double-crystal monochromators using rocking-curve tomography.

Journal of synchrotron radiation·2026

Same author

Total-reflection-based microscope compatible with X-ray and visible light for sample positioning.

Journal of synchrotron radiation·2026

Same author

High-speed imaging of cutting and electrical discharge machining (EDM) in thin metals and fluids using high-intensity 100 keV x rays.

The Review of scientific instruments·2026

Same author

Channel-cut monochromator withstanding incident powers above 400 W on undulator beamlines. Corrigendum.

Journal of synchrotron radiation·2026

Same author

Experimental calibration of grating period mismatch in Talbot interferometry for accurate x-ray wavefront and surface metrology.

The Review of scientific instruments·2026

Same journal

A compact low-power magnetic particle imaging scanner based on a permanent-magnet field-free-line generator with high gradient.

The Review of scientific instruments·2026

Same journal

Achieving ultrahigh resolution with high efficiency: Optical design of the two-dimensional Resonant Inelastic X-ray Scattering (2D-RIXS) spectrometer at NanoTerasu beamline 02U.

The Review of scientific instruments·2026

Same journal

Automated laboratory x-ray diffractometer and fluorescence spectrometer for high-throughput materials characterization.

The Review of scientific instruments·2026

Same journal

Nonlinear Bayesian Doppler tomography for simultaneous reconstruction of flow and temperature.

The Review of scientific instruments·2026

Same journal

A Reflectance-based multimodal wearable photoplethysmography (PPG) sensor.

The Review of scientific instruments·2026

Same journal

Temporal analysis of products-Raman (TAP-Raman): An integrated setup for operando spectroscopy and transient kinetic analysis.

The Review of scientific instruments·2026

See all related articles

Search research articles

Related Experiment Video

Updated: Mar 20, 2026

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry

Published on: August 12, 2013

Stitching interferometry for ellipsoidal x-ray mirrors.

Hirokatsu Yumoto¹, Takahisa Koyama¹, Satoshi Matsuyama²

¹Japan Synchrotron Radiation Research Institute/SPring-8, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan.

The Review of Scientific Instruments

|June 3, 2016

Summary

This summary is machine-generated.

A new surface metrology system accurately measures nano-focusing ellipsoidal mirrors, overcoming challenges with small radii of curvature. This advancement enables the fabrication of advanced x-ray optics.

More Related Videos

High-speed Continuous-wave Stimulated Brillouin Scattering Spectrometer for Material Analysis

High-speed Continuous-wave Stimulated Brillouin Scattering Spectrometer for Material Analysis

Published on: September 22, 2017

Three-dimensional Super Resolution Microscopy of F-actin Filaments by Interferometric PhotoActivated Localization Microscopy iPALM

Three-dimensional Super Resolution Microscopy of F-actin Filaments by Interferometric PhotoActivated Localization Microscopy iPALM

Published on: December 1, 2016

Related Experiment Videos

Last Updated: Mar 20, 2026

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry

The Generation of Higher-order Laguerre-Gauss Optical Beams for High-precision Interferometry

Published on: August 12, 2013

High-speed Continuous-wave Stimulated Brillouin Scattering Spectrometer for Material Analysis

High-speed Continuous-wave Stimulated Brillouin Scattering Spectrometer for Material Analysis

Published on: September 22, 2017

Three-dimensional Super Resolution Microscopy of F-actin Filaments by Interferometric PhotoActivated Localization Microscopy iPALM

Three-dimensional Super Resolution Microscopy of F-actin Filaments by Interferometric PhotoActivated Localization Microscopy iPALM

Published on: December 1, 2016

Area of Science:

Optics
Metrology
Materials Science

Background:

Ellipsoidal mirrors offer superior two-dimensional x-ray focusing compared to elliptical-cylinder mirrors.
Fabricating nano-focusing ellipsoidal mirrors is challenging due to metrology difficulties stemming from small radii of curvature.

Purpose of the Study:

To develop a surface metrology system for nano-focusing ellipsoidal mirrors.
To address the challenges in measuring the precise surface shapes of these advanced x-ray optics.

Main Methods:

Utilized stitching interferometric techniques combining microscopic and Fizeau interferometers.
Developed correction methods for systematic errors, specifically off-axis aberrations from the microscopic interferometer.
Measured sub-aperture shapes and their tilt angles, then stitched them using relative angles.

Main Results:

Achieved a measurement repeatability of 0.51 nm (root-mean-square) for an ellipsoidal mirror with a 3.6-mm radius of curvature.
The metrology system demonstrated accuracy suitable for nano-focusing x-ray mirror surface requirements.
Successfully estimated systematic errors by measuring tilted plane and ellipsoidal substrates.

Conclusions:

The developed stitching interferometric metrology system is effective for nano-focusing ellipsoidal mirrors.
This system overcomes previous limitations in surface metrology for such optics.
The technology is poised to facilitate the fabrication of next-generation nano-focusing ellipsoidal x-ray mirrors.