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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
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A method of hard X-ray phase-shifting digital holography
So Yeong Park1, Chung Ki Hong1, Jun Lim2
1Department of Physics, POSTECH, 77 Cheongam-Ro, Pohang, Kyoungbuk 37673, South Korea.
Journal of Synchrotron Radiation
|July 1, 2016
Summary
A novel phase-shifting digital holography method was developed for hard X-ray imaging. This technique successfully reconstructs 3D structures using a specialized phase plate and a three-step algorithm.
Area of Science:
- Optics and Photonics
- Materials Science
- X-ray Imaging
Background:
- Digital holography offers 3D imaging capabilities.
- Hard X-ray applications require specialized holographic techniques.
- Phase-shifting algorithms enhance holographic reconstruction accuracy.
Purpose of the Study:
- To demonstrate a new phase-shifting digital holography method in the hard X-ray region.
- To develop an in-line holography setup for hard X-ray synchrotron sources.
- To enable accurate 3D shape measurement of micro- and nano-scale objects.
Main Methods:
- An in-line phase-shifting holography setup was implemented at a 6.80 keV hard X-ray synchrotron beamline.
- A phase plate with a hole and band was used at the Fresnel lens focus.
- A three-step phase-shift algorithm was employed for holographic reconstruction.
Main Results:
- Successful phase shifting of reference and objective beams was achieved.
- The system accurately measured the 3D shape of a gold test pattern.
- The morphology of a silica sphere was precisely reconstructed.
Conclusions:
- The demonstrated method provides a viable approach for hard X-ray digital holography.
- This technique enhances 3D imaging capabilities in the hard X-ray spectrum.
- The system is suitable for metrology and characterization of microstructures.
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