Electromagnetic biaxial vector scanner using radial magnetic field.

Area of Science:

• MEMS technology
• Electromagnetic actuators
• Micro-optics

Background:

• Conventional electromagnetic actuators rely on linear magnetic fields.
• Existing designs often require hermetic packaging and larger volumes.
• Achieving two-degree-of-freedom scanning presents engineering challenges.

Purpose of the Study:

• To present a novel electromagnetic biaxial vector-graphic scanning micromirror.
• To demonstrate a scanning motion enabled by a radial magnetic field and unique current paths.
• To achieve a compact device volume with high driving torque.

Main Methods:

• Utilizing a radial magnetic field generated by concentrically assembled magnets.
• Designing unique current paths for two-degree-of-freedom scanning motion.
• Employing feedback control for forced actuation along both scan axes.

Main Results:

• Achieved mechanical half scan angles of 6.43° (horizontal) and 4.20° (vertical) at specific DC currents.
• Demonstrated large driving torque generation without hermetic packaging.
• Realized compact device volume compared to conventional designs.

Conclusions:

• The proposed electromagnetic scanning micromirror offers a viable alternative to conventional actuators.
• The radial magnetic field and unique current path design enable efficient biaxial scanning.
• This technology holds promise for miniaturized optical systems and advanced scanning applications.