Absolute distance measurement by multi-heterodyne interferometry using a frequency comb and a cavity-stabilized...

In this paper, we develop a multi-heterodyne system capable of absolute distance measurement using a frequency comb and a tunable diode laser locked to a Fabry-Perot cavity. In a series of subsequent measurements, numerous beat components can be obtained by downconverting the optical frequency into the RF region with multi-heterodyne interferometry. The distances can be measured via the mode phases with a series of synthetic wavelengths. The comparison with the reference interferometer shows an agreement within 1.5 μm for the averages of five measurements and 2.5 μm for the single measurement, which is at the 10^-8 relative precision level.