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Updated: Mar 17, 2026

Growth and Electrostatic/chemical Properties of Metal/LaAlO3/SrTiO3 Heterostructures
Published on: February 8, 2018
Assessing electron beam sensitivity for SrTiO3 and La0.7Sr0.3MnO3 using electron energy loss spectroscopy
Magnus Nord1, Per Erik Vullum2, Ingrid Hallsteinsen3
1Department of Physics, NTNU, Trondheim, Norway.
Electron beam damage thresholds were studied in La0.7Sr0.3MnO3 and SrTiO3 using scanning transmission electron microscopy (STEM) and electron energy loss spectroscopy (EELS). Damage detection is more reliable via EELS than STEM imaging, especially at lower voltages.
Area of Science:
- Materials Science
- Solid State Physics
- Electron Microscopy
Background:
- Electron beam irradiation can induce damage in materials during microscopy.
- Understanding beam damage thresholds is crucial for accurate material characterization.
- Aberration-corrected scanning transmission electron microscopy (STEM) and electron energy loss spectroscopy (EELS) are powerful techniques for nanoscale analysis.
Purpose of the Study:
- To determine the thresholds for electron beam damage in La0.7Sr0.3MnO3 and SrTiO3.
- To evaluate the effectiveness of STEM imaging versus EELS for detecting beam damage.
- To assess the influence of acceleration voltage, probe current, and exposure time on material damage.
Main Methods:
- Materials (La0.7Sr0.3MnO3 and SrTiO3) were subjected to intense electron probe exposure using STEM.
- Simultaneous EELS data acquisition was performed during electron beam irradiation.
- Electron beam damage was quantified by analyzing changes in core loss fine structure using a refined model-based approach.
Main Results:
- SrTiO3 showed beam damage at 200kV (detected by EELS and STEM contrast), but not at 80kV.
- La0.7Sr0.3MnO3 exhibited beam damage at both 80kV and 200kV, detectable by EELS but not STEM contrast.
- STEM image contrast changes due to minor damage can be difficult to discern under common experimental conditions.
Conclusions:
- EELS is a more sensitive technique than STEM imaging for detecting early-stage electron beam damage in these materials.
- The common practice of comparing pre- and post-acquisition STEM images may lead to misinterpretation of beam damage as genuine material property changes.
- Lower acceleration voltages (e.g., 80kV) can mitigate beam damage in certain materials like SrTiO3.
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