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High-purity 3D nano-objects grown by focused-electron-beam induced deposition
Rosa Córdoba1, Nidhi Sharma, Sebastian Kölling
1Department of Applied Physics, Eindhoven University of Technology, PO Box 513, 5600 MB Eindhoven, The Netherlands.
Nanotechnology
|July 26, 2016
Summary
Researchers fabricated high-purity 3D iron and cobalt nanopillars using focused-electron-beam induced deposition (FEBID). Deposition conditions critically influence nanostructure purity, enabling future 3D nano-electronic devices.
Area of Science:
- Materials Science
- Nanotechnology
- Physics
Background:
- Transitioning electronics to 3D architectures is crucial for next-generation memory, sensing, and logic devices.
- Fabricating 3D nano-objects presents significant challenges, necessitating advanced nanofabrication techniques.
Purpose of the Study:
- To develop and characterize 3D iron and cobalt nanopillars using focused-electron-beam induced deposition (FEBID).
- To investigate the compositional homogeneity and purity of FEBID-grown nanostructures.
- To explore the potential of FEBID for creating 3D core-shell architectures for nano-electronics.
Main Methods:
- Focused-electron-beam induced deposition (FEBID) was employed to grow 3D nanopillars.
- Diiron nonacarbonyl (Fe2(CO)9) and dicobalt octacarbonyl (Co2(CO)8) were used as precursor materials.
- Atom probe tomography was utilized for sub-nanometer scale compositional analysis.
Main Results:
- High-purity 3D vertical nanostructures (∼50 nm diameter, micrometers in length) of iron (>90 at%) and cobalt (>95 at%) were fabricated.
- Nanopillar purity was found to be directly dependent on the FEBID growth regime and deposition conditions.
- The study demonstrated the capability of FEBID for analyzing single-element structures and 3D core-shell architectures.
Conclusions:
- FEBID is a viable technique for fabricating high-purity 3D nanostructures for nano-electronic applications.
- Precise control over deposition parameters is essential for achieving desired nanostructure quality.
- This approach offers a promising route for designing advanced 3D nano-elements and studying complex architectures.
