High speed single- and dual-stage vertical positioners.

Area of Science:

• Mechanical Engineering
• Optics and Photonics
• Materials Science

Background:

• Precise motion control is critical for advanced optical systems.
• Existing vertical positioners often face limitations in speed and resonance frequency.
• Piezoelectric actuators offer high resolution but require careful design for dynamic performance.

Purpose of the Study:

• To develop and characterize high-speed single- and dual-stage vertical positioners.
• To enhance the mechanical resonance frequency of piezoelectric actuators.
• To enable precise and rapid positioning for demanding optical applications.

Main Methods:

• Utilized a novel end-constraint method with orthogonal flexures.
• Preloaded piezoelectric stack actuators for enhanced performance.
• Implemented an inertial counterbalance technique in the dual-stage design.

Main Results:

• Single-stage positioner: 7.6 μm displacement, 46.8 kHz resonance frequency.
• Dual-stage positioner: ~10 μm travel range, 130 kHz resonance frequency.
• The end-constraint method significantly increased mechanical resonance frequency.

Conclusions:

• The developed vertical positioners offer high-speed capabilities and improved dynamic performance.
• The novel design effectively increases resonance frequency, crucial for optical applications.
• These positioners provide a viable solution for high-precision, high-speed motion control in optical systems.