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S Fernandez Bordín1, S Limandri1, J M Ranalli2
1Instituto de Física Enrique Gaviola, CONICET. M. Allende s/n, Ciudad Universitaria, 5000 Córdoba, Argentina.
Monte Carlo simulations reveal electron backscatter diffraction (EBSD) spatial resolution in steel. Beam size significantly impacts lateral resolution (20nm), with longitudinal (75nm) and depth (16nm) resolutions also determined.
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