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X-ray reflectivity imager with 15 W power X-ray source
Jinxing Jiang1, Kenji Sakurai1
1University of Tsukuba, 1-1-1, Tennodai, Tsukuba, Ibaraki 305-0006, Japan and National Institute for Materials Science, 1-2-1, Sengen, Tsukuba, Ibaraki 305-0047, Japan.
The Review of Scientific Instruments
|October 27, 2016
Summary
X-ray reflectivity imaging offers a new way to analyze complex thin film structures. This technique reconstructs images from X-ray reflections, overcoming limitations of traditional methods for patterned samples.
Area of Science:
- Materials Science
- Surface Science
- Imaging Techniques
Background:
- X-ray reflectivity (XRR) is standard for uniform thin films.
- Traditional XRR has limitations for inhomogeneous or patterned samples.
- X-ray reflectivity imaging (XRI) is a developing technique for complex structures.
Purpose of the Study:
- To detail the instrumental aspects of a compact X-ray reflectivity imager.
- To demonstrate the system's functionality despite a low-power X-ray source.
- To address system calibration challenges in grazing incidence geometry.
Main Methods:
- Development of a compact X-ray reflectivity imager.
- System calibration procedures for grazing incidence.
- Image reconstruction from multiple X-ray reflection projections.
Main Results:
- Successful operation of the XRI system with a 15 W X-ray source.
- Demonstration of buried interface visualization.
- Analysis of the physical meaning of reconstructed images.
Conclusions:
- X-ray reflectivity imaging is a viable technique for analyzing inhomogeneous thin films.
- The compact imager provides valuable insights into buried interfaces.
- Further improvements in XRI systems are possible for enhanced imaging capabilities.
