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Characterization of Ultra-fine Grained and Nanocrystalline Materials Using Transmission Kikuchi Diffraction
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Phase Identification in a Scanning Electron Microscope Using Backscattered Electron Kikuchi Patterns.

R P Goehner1, J R Michael1

  • 1Materials and Process Sciences Center, Sandia National Laboratories, Albuquerque, NM 87185-1405.

Journal of Research of the National Institute of Standards and Technology
|January 1, 1996
PubMed
Summary
This summary is machine-generated.

A new detector enables collecting Backscattered Electron Kikuchi Patterns (BEKP) in scanning electron microscopes (SEM). This allows for crystallographic phase analysis of bulk specimens at high magnifications, advancing materials science.

Keywords:
Kikuchi patternselectron diffractionscanning electron microscopy

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Area of Science:

  • Materials Science
  • Crystallography
  • Electron Microscopy

Background:

  • Crystallographic phase analysis is crucial for understanding material properties.
  • Traditional methods may have limitations in high-magnification or bulk sample analysis.

Purpose of the Study:

  • To introduce a novel detector for collecting Backscattered Electron Kikuchi Patterns (BEKP) in a Scanning Electron Microscope (SEM).
  • To enable high-magnification crystallographic phase identification on bulk specimens.

Main Methods:

  • Utilized a newly developed charge-coupled device (CCD) based detector.
  • Collected Backscattered Electron Kikuchi Patterns (BEKP) within a Scanning Electron Microscope (SEM).
  • Integrated SEM imaging, BEKP, and energy-dispersive X-ray spectrometry.

Main Results:

  • Demonstrated the feasibility of collecting BEKP suitable for crystallographic phase analysis using the new detector.
  • Achieved high-magnification imaging and BEKP collection from bulk specimens.
  • Showcased the potential of combining SEM, BEKP, and energy-dispersive X-ray spectrometry.

Conclusions:

  • The new CCD-based detector facilitates advanced crystallographic phase analysis in SEM.
  • This technique offers a powerful new tool for materials science research.
  • High-magnification analysis of bulk materials is now more accessible.