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Broad ion beam serial section tomography.

B Winiarski1, A Gholinia2, K Mingard3

  • 1School of Materials, University of Manchester, Manchester M13 9PL, UK; Materials Division, National Physical Laboratory, Teddington TW11 0LW, UK.

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Summary
This summary is machine-generated.

Serial Broad Ion Beam (BIB) ion polishing enables advanced 3D material characterization for large volumes. This technique, suitable for 3D Electron Backscatter Diffraction (EBSD), requires addressing distortions for accurate analysis.

Keywords:
3D electron back scattered diffractionCermetComputed tomography (CT)Focused ion beam (FIB)Ion beam polishingScanning electron microscopy

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Area of Science:

  • Materials Science
  • Microscopy
  • Nanotechnology

Background:

  • Serial section tomography (SST) is crucial for 3D material characterization.
  • Broad Ion Beam (BIB) polishing offers potential for advanced SST.
  • Current SST methods face challenges with large volumes and data accuracy.

Purpose of the Study:

  • To evaluate serial Broad Ion Beam (BIB) Ar+ ion polishing for large-volume 3D material characterization.
  • To quantify slice thickness and parallelism variations in BIB systems (Gatan PECS, Ilion).
  • To assess BIB suitability for 3D Electron Backscatter Diffraction (EBSD) data acquisition.

Main Methods:

  • Utilized serial Broad Ion Beam (BIB) Ar+ ion polishing for sample preparation.
  • Employed Gatan PECS and Ilion BIB systems for large volume serial sectioning.
  • Acquired 3D Electron Backscatter Diffraction (EBSD) data from WC-11%wt. Co hardmetal.
  • Quantified slice thickness and parallelism variations.

Main Results:

  • BIB polishing is effective for 3D material characterization of volumes >100µm, potentially millimetre-sized.
  • Low damage from BIB milling supports high-rate 3D EBSD acquisition.
  • Significant variations in slice thickness and parallelism were observed between BIB systems.
  • Raw 2D-EBSD maps exhibit distortions and artefacts impacting 3D EBSD quantitative analysis.

Conclusions:

  • Serial BIB ion polishing is a promising technique for large-volume 3D material characterization and EBSD.
  • Addressing distortions and artefacts in serial sectioning data is critical for accurate 3D analysis.
  • Automated serial sectioning BIB systems are expected to significantly improve efficiency.