Mid-Infrared Tunable Resonant Cavity Enhanced Detectors

Area of Science:

• Optoelectronics
• Materials Science
• Nanotechnology

Background:

• Mid-infrared (MIR) detectors typically have fixed spectral sensitivities.
• Tunable spectral selectivity is crucial for advanced MIR spectroscopy and sensing.
• Existing tunable detector technologies can be complex or lack compactness.

Purpose of the Study:

• To present novel mid-infrared detectors with tunable narrow spectral band sensitivity.
• To demonstrate the feasibility of compact tunable detector systems using MEMS technology.
• To explore applications in micro-spectrometers and Adaptive Focal Plane Arrays (AFPA).

Main Methods:

• Utilized the Resonant Cavity Enhanced Detector (RCED) principle.
• Employed thin IV-VI narrow gap semiconductor layers for the active region.
• Integrated a Fabry-Pérot cavity with displaceable MEMS micromirrors for tuning.

Main Results:

• Achieved tunable narrow spectral band sensitivity in MIR detectors.
• Fabricated compact tunable detector systems using electrostatically actuated MEMS micromirrors.
• Demonstrated mirror movements exceeding 3 μm at 30V, enabling a ~0.7 μm wavelength tuning range.

Conclusions:

• The developed RCEDs offer a compact and effective solution for tunable MIR detection.
• The technology is suitable for integration into micro-spectrometers and AFPA systems.
• This advancement facilitates enhanced spectral analysis and sensing capabilities in the mid-infrared range.