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Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
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3D elemental mapping with nanometer scale depth resolution via electron optical sectioning.

Timothy J Pennycook1, Hao Yang2, Lewys Jones2

  • 1EPSRC SuperSTEM Facility, Daresbury Laboratory, Warrington WA4 4AD, UK; Department of Materials, University of Oxford, Parks Road, Oxford OX1 3PH, UK.

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|December 25, 2016
PubMed
Summary
This summary is machine-generated.

Scanning transmission electron microscopy with electron energy loss spectroscopy now offers depth sensitivity for elemental mapping. This technique achieves nanometer-scale depth resolution, enabling 3D elemental analysis of materials.

Keywords:
EELSOptical sectioningSTEM

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • Electron energy loss spectroscopy (EELS) in scanning transmission electron microscopy (STEM) is a standard for elemental mapping.
  • Traditional EELS-STEM lacks depth sensitivity, limiting 3D material analysis.
  • Achieving depth resolution requires high lateral spatial frequency transfer.

Purpose of the Study:

  • To introduce depth sensitivity to EELS-STEM for elemental mapping.
  • To enable 3D elemental analysis of material structures.
  • To improve the interpretability of nanoscale compositional data.

Main Methods:

  • Performing spectrum imaging with atomic resolution in STEM.
  • Utilizing optical sectioning principles through high spatial frequency transfer.
  • Applying the technique to an oxide heterostructure.

Main Results:

  • Achieved nanometer-scale depth resolution in elemental mapping.
  • Demonstrated successful spectroscopic optical sectioning of an oxide heterostructure.
  • Generated 3D elemental maps sensitive to atomic-scale compositional changes.

Conclusions:

  • Atomic-resolution EELS-STEM provides unprecedented depth sensitivity for elemental mapping.
  • 3D elemental mapping offers enhanced interpretability compared to traditional Z-contrast imaging.
  • This advancement opens new avenues for analyzing complex material interfaces and structures.