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Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers

Guillermo Royo1, Carlos Sánchez-Azqueta2, Cecilia Gimeno3

  • 1Group of Electronic Design-Aragón Institute of Engineering Research, Universidad de Zaragoza, 50009 Zaragoza, Spain. royo@unizar.es.

Sensors (Basel, Switzerland)
|January 3, 2017
PubMed

Keywords:
accelerometercapacitive sensingmicroelectromechanical systems (MEMS)synchronous demodulationtransimpedance amplifier

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