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High-resolution scanning precession electron diffraction: Alignment and spatial resolution.

Jonathan S Barnard1, Duncan N Johnstone1, Paul A Midgley1

  • 1Department of Materials Science & Metallurgy, University of Cambridge, 27 Charles Babbage Road, Cambridge CB3 0FS, United Kingdom.

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Summary
This summary is machine-generated.

This study presents methods for aligning electron probes in scanning transmission electron microscopy (STEM) to achieve high-resolution scanning precession electron diffraction (SPED) maps. Spatial resolution in SPED is limited by electronic noise at low precession angles and astigmatism at high angles.

Keywords:
AlignmentElectron diffractionPrecessionSTEMStrain

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Area of Science:

  • Materials Science
  • Electron Microscopy
  • Nanotechnology

Background:

  • Scanning transmission electron microscopy (STEM) is a powerful tool for materials characterization.
  • Scanning precession electron diffraction (SPED) enhances spatial resolution in STEM.
  • Accurate probe alignment is crucial for high-resolution diffraction data.

Purpose of the Study:

  • To develop and validate a method for aligning the precessing electron probe in STEM.
  • To assess the spatial resolution limits of SPED experiments.
  • To identify factors limiting spatial resolution in SPED.

Main Methods:

  • Probe alignment performed in diffraction mode, minimizing bright-field convergent beam electron diffraction (CBED) disk wander.
  • Analysis of virtual bright-field images from SPED data using power spectra.
  • Measurement of precession-induced blur as a function of precession angle.

Main Results:

  • A novel alignment procedure for precessing electron probes in STEM was established.
  • SPED spatial resolution was quantitatively measured.
  • Low precession angles were limited by electronic scan coil noise; high angles by tilt-induced astigmatism due to spherical aberration.

Conclusions:

  • The developed alignment method enables high-resolution SPED mapping.
  • Understanding resolution limitations is key for optimizing SPED experiments.
  • Spherical aberration and electronic noise are critical factors affecting SPED spatial resolution.