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Atom-counting in High Resolution Electron Microscopy:TEM or STEM - That's the question.

J Gonnissen1, A De Backer1, A J den Dekker2

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Summary

High Resolution Scanning Transmission Electron Microscopy (HR STEM) and High Resolution Transmission Electron Microscopy (HR TEM) are compared for atom-counting. HR STEM generally performs better for practical atom counting, though HR TEM shows theoretical potential under specific conditions.

Keywords:
Data processing/image processingElectron microscope design and characterisationHigh-resolution (scanning) transmission electron microscopy (HR (S)TEM)

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Area of Science:

  • Materials Science
  • Physics
  • Microscopy

Background:

  • Atom-counting is crucial for materials characterization.
  • High Resolution Scanning Transmission Electron Microscopy (HR STEM) is established for atom-counting.
  • High Resolution Transmission Electron Microscopy (HR TEM) with negative spherical aberration imaging is a newer technique for atom-counting.

Purpose of the Study:

  • To quantitatively compare the capabilities and limitations of HR STEM and HR TEM for atom-counting.
  • To evaluate both techniques using the probability of error as a key performance metric.
  • To determine the optimal conditions and practical applicability of each microscopy method for precise atom enumeration.

Main Methods:

  • Utilized a quantitative approach based on detection theory principles.
  • Compared HR STEM and HR TEM using probability of error analysis.
  • Investigated atom-counting performance based on peak intensity probability functions and scattering cross-sections.

Main Results:

  • HR STEM generally outperforms HR TEM for atom-counting under common practical standards.
  • When using joint probability functions and accurate thickness dependence, HR TEM shows theoretical potential for lower error rates.
  • HR STEM's standard approach demonstrates high performance and practical reliability for atom-counting.

Conclusions:

  • HR STEM is a reliable and high-performing method for practical atom-counting.
  • HR TEM offers theoretical advantages for atom-counting under optimized, data-intensive conditions.
  • The choice between HR STEM and HR TEM depends on practical constraints and desired accuracy for atom enumeration.