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Assessment of engineered surfaces roughness by high-resolution 3D SEM photogrammetry

L C Gontard1, J D López-Castro2, L González-Rovira2

  • 1Departamento de Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica, Universidad de Cádiz, Puerto Real 11510, Spain.

Ultramicroscopy
|March 25, 2017
PubMed

Keywords:
3DSEMPatterned surfacesPhotogrammetryProfilometryRoughnessSEM metrologyStereo-photogrammetry

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