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Qian Cao1, Ya-Wei Dai1, Jing Xu1
1State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University , Shanghai 200433, China.
Stable p-type doping of two-dimensional (2D) semiconductors like WS2 is achieved using nitrogen substitution during film sulfurization. This method enables reproducible, wafer-level fabrication for advanced 2D CMOS electronics.
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