Mode selection for electrostatic beam resonators based on motional resistance and quality factor

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Updated: Mar 2, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
15:25

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

6.6K

Jeong Hoon Ryou1,2, Jason J Gorman1

  • 1National Institute of Standards and Technology, 100 Bureau Drive, Stop 8212, Gaithersburg, MD 20899-8212, USA.

Journal of Applied Physics
|May 16, 2017
PubMed

Keywords:
MEMS resonatorelectrostaticmotional resistancequality factorvibration modes

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