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Updated: Feb 23, 2026

Determination of the Excitation and Coupling Rates Between Light Emitters and Surface Plasmon Polaritons

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Published on: July 21, 2018

Sequential Feature-Density Doubling for Ultraviolet Plasmonics.

Michael P Knudson¹, Alexander J Hryn¹, Mark D Huntington¹

¹Department of Materials Science and Engineering and ‡Department of Chemistry, Northwestern University , Evanston, Illinois 60208, United States.

ACS Applied Materials & Interfaces

|September 14, 2017

Summary

This summary is machine-generated.

This study presents a scalable method to create dense nanopatterns down to 100 nm. The technique uses controlled etching and template stripping to generate aluminum nanogratings for plasmonics.

Keywords:

aluminum lithography nanopatterning surface plasmon template stripping ultraviolet plasmonics

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Area of Science:

Materials Science
Nanotechnology
Optics

Background:

Fabricating nanostructures with sub-200 nm periodicities over large areas is difficult with current methods.
Achieving high feature density is crucial for advanced optical and electronic applications.

Purpose of the Study:

To demonstrate a scalable technique for feature-density doubling in nanopatterning.
To generate nanopatterned lines with periodicities down to 100 nm over centimeter-square areas.

Main Methods:

Controlled wet overetching of atomic-layer deposited alumina masks to achieve nanoscale feature sizes.
Transferring features into silicon to create masters for template stripping.
Fabricating aluminum nanogratings with varying periodicities via template stripping.

Main Results:

Successfully generated nanopatterned lines with periodicities down to 100 nm over areas greater than 3 cm².
Demonstrated feature-density doubling capability.
Aluminum nanogratings exhibited surface plasmon polariton modes at ultraviolet wavelengths.

Conclusions:

The developed method offers a scalable solution for producing high-density nanopatterns.
The observed plasmonic behavior is dependent on nanograting periodicity and excitation angle, aligning with theoretical predictions.