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Three-Dimensional (3D) Nanometrology Based on Scanning Electron Microscope (SEM) Stereophotogrammetry.

Vipin N Tondare1,2, John S Villarrubia1, András E Vladár1

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Summary

Stereophotogrammetry software packages for 3D surface reconstruction from scanning electron microscope (SEM) images show high error in uniform zones. Further improvements are needed for reliable 3D modeling of low-contrast SEM samples.

Keywords:
JMONSELnanometrologyphotogrammetryscanning electron microscopythree-dimensional

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Area of Science:

  • Materials Science
  • Computer Vision
  • Metrology

Background:

  • Three-dimensional (3D) surface reconstruction from Scanning Electron Microscope (SEM) images is a long-established technique.
  • Several commercial stereophotogrammetry software packages are currently available for this purpose.

Purpose of the Study:

  • To evaluate the performance of commercially available stereophotogrammetry software packages.
  • To assess the accuracy of 3D reconstruction using simulated SEM images of virtual samples with known dimensions.

Main Methods:

  • Utilized Monte Carlo simulated SEM images of virtual samples with precisely known geometry.
  • Tested two stereophotogrammetry software packages by comparing their reconstructed 3D models against the ground truth of the virtual samples.
  • Investigated performance on samples with both rough and uniform (low-contrast) surfaces.

Main Results:

  • Both tested software packages performed well on simulated SEM images of samples with rough surfaces.
  • Significant height reconstruction errors (approximately 46%) were observed in samples with nearly uniform, low-contrast zones.
  • The accuracy of 3D reconstruction is highly dependent on surface topography and contrast.

Conclusions:

  • Current stereophotogrammetry software packages require further development for reliable 3D reconstruction from SEM images, particularly those with uniform or low-contrast regions.
  • The use of simulated SEM images provides a valuable method for algorithm testing and validation in 3D reconstruction.