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Nonuniform Composition Profiles in Amorphous Multimetal Oxide Thin Films Deposited from Aqueous Solution
Keenan N Woods1, Milana C Thomas2, Gavin Mitchson1
1Department of Chemistry & Biochemistry and Materials Science Institute, University of Oregon , Eugene, Oregon 97403, United States.
ACS Applied Materials & Interfaces
|September 30, 2017
Summary
Lanthanum zirconium oxide (LZO) thin films show uneven metal distribution, with lanthanum concentrating at the surface. Multilayer LZO films exhibit enhanced dielectric properties due to La-rich interfaces, suggesting their suitability for device applications.
Area of Science:
- Materials Science
- Thin Film Deposition
- Nanotechnology
Background:
- Metal oxide thin films are crucial for technology, often using multiple metals for tailored properties.
- Solution deposition allows precise control over multimetal oxide film composition.
- Previous work indicated nonuniform electron densities in aqueous-deposited films.
Purpose of the Study:
- To investigate the cause of nonuniform electron densities in lanthanum zirconium oxide (LZO) thin films.
- To analyze the distribution of metal components within single-layer and multilayer LZO films.
- To evaluate the impact of metal distribution on the dielectric properties of LZO films for device applications.
Main Methods:
- Solution deposition of lanthanum zirconium oxide (LZO) thin films.
- Analysis of metal component distribution using electron density profiling.
- Fabrication and testing of metal-insulator-semiconductor devices with LZO films.
Main Results:
- Inhomogeneous distribution of lanthanum (La) and zirconium (Zr) in LZO thin films was confirmed.
- La was found to aggregate at the film surface, while Zr was evenly distributed.
- Multilayer LZO films showed La-rich interfaces and exhibited higher dielectric constants than single-layer films.
Conclusions:
- Inhomogeneous metal distribution in LZO films does not negatively affect dielectric properties.
- Multilayer LZO films demonstrate superior dielectric performance due to enhanced condensation and densification.
- Multilayer LZO films are promising for device applications despite inherent layering artifacts.
