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Monolithically integrated InAs/InGaAs quantum dot photodetectors on silicon substrates.
Optics Express
|November 3, 2017
Summary
We developed novel indium arsenide/indium gallium arsenide quantum dot (QD) waveguide photodetectors (PD) on silicon. These devices exhibit ultra-low dark current and high responsivity, enabling on-chip photodetection for integrated photonic circuits.
Area of Science:
- Semiconductor Physics
- Optoelectronics
- Materials Science
Background:
- Monolithic integration of optoelectronic devices on silicon is crucial for advanced photonic integrated circuits.
- Quantum dot (QD) materials offer unique optical properties suitable for photodetector applications.
Purpose of the Study:
- To demonstrate monolithically integrated InAs/InGaAs quantum dot waveguide photodetectors (PD) on silicon substrates.
- To characterize the performance, including dark current, responsivity, and high-speed response, of these novel QD-on-silicon PDs.
- To explore the potential for on-chip photodetection within a silicon photonics platform.
Main Methods:
- Fabrication of a high-crystalline quality GaAs-on-Si template using aspect ratio trapping, cyclic thermal annealing, and strain-balancing layers.
- Growth of InAs/InGaAs quantum dots within a waveguide structure on the prepared GaAs-on-Si template.
- Characterization of the waveguide photodetector performance, including dark current, internal responsivity, and high-speed response in the O-band spectrum.
Main Results:
- Achieved ultra-low dark current of 0.8 nA and internal responsivity of 0.9 A/W in the O-band.
- Successfully demonstrated high-speed performance and on-chip photodetection for the QD-on-silicon system.
- The waveguide PDs are compatible with existing micro-ring laser platforms for potential integration.
Conclusions:
- Monolithic integration of InAs/InGaAs quantum dot waveguide photodetectors on silicon is feasible and offers excellent performance.
- These integrated photodetectors are suitable for applications such as on-chip optical power monitors and pre-amplified receivers.
- This work advances the development of complex silicon photonic integrated circuits by enabling efficient on-chip photodetection.

