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Precise method for measuring spatial coherence in TEM beams using Airy diffraction patterns.

Jun Yamasaki1, Yuki Shimaoka2, Hirokazu Sasaki3

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We developed a new method to measure electron beam spatial coherence without an electron biprism. This technique precisely quantifies coherence and lens aberrations in transmission electron microscopes.

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Area of Science:

  • Physics
  • Materials Science
  • Electron Microscopy

Background:

  • Precise measurement of spatial coherence in electron beams is crucial for advanced microscopy techniques.
  • Existing methods often require specialized equipment like electron biprisms, limiting their accessibility.

Purpose of the Study:

  • To develop a novel, accessible method for precisely measuring spatial coherence in electron beams.
  • To enable simultaneous determination of diffraction blurring and lens aberrations.

Main Methods:

  • Utilizing the Airy diffraction pattern of a selector aperture in analytical transmission electron microscopes.
  • Fitting the diffraction pattern to determine geometric aberrations and the point-spread function.
  • Separating spatial coherence components from point-spread functions using measurements across various beam diameters.

Main Results:

  • A method for precise spatial coherence measurement without an electron biprism was established.
  • Simultaneous determination of diffraction blurring and lens aberrations is achievable.
  • A linear relationship between spatial coherence length and beam diameter was identified, allowing measurement for coherence lengths >80% of the aperture diameter.

Conclusions:

  • The proposed method offers a practical and accurate way to assess electron beam spatial coherence.
  • This technique can be implemented in standard analytical transmission electron microscopes.
  • The ability to simultaneously determine coherence, aberrations, and blurring opens new avenues for microscopy applications.