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The Gaseous Electronics Conference RF Reference Cell-An Introduction.

J K Olthoff1, K E Greenberg2

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899-0001.

Journal of Research of the National Institute of Standards and Technology
|November 21, 2017
PubMed
Summary
This summary is machine-generated.

This paper introduces the Gaseous Electronics Conference (GEC) RF Reference Cell, a standardized tool for plasma research. It details the cell's history, design evolution, and research applications, providing a comprehensive resource for scientists.

Keywords:
Gaseous Electronics Conferenceplasma reactorradio frequencyreference cell

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Area of Science:

  • Plasma Physics
  • Materials Science
  • Surface Science

Background:

  • The Gaseous Electronics Conference (GEC) RF Reference Cell is a standardized experimental setup used globally for plasma research.
  • Understanding plasma-surface interactions is crucial for various technological applications, including semiconductor manufacturing and lighting.

Purpose of the Study:

  • To provide an introduction to the GEC RF Reference Cell and its significance in plasma research.
  • To document the history, purpose, and recent design modifications of the GEC Cell.
  • To highlight research conducted using GEC Cells and compile a comprehensive bibliography of relevant publications.

Main Methods:

  • Review of historical development and design principles of the GEC RF Reference Cell.
  • Documentation of recent advancements and modifications in the GEC Cell design.
  • Compilation and summary of research findings from studies utilizing GEC Cells.

Main Results:

  • The paper introduces the GEC RF Reference Cell and its foundational role in plasma research.
  • Recent design improvements to the GEC Cell are detailed, enhancing its utility and applicability.
  • A comprehensive overview of research highlights and an appendix of publications are provided, serving as a valuable resource.

Conclusions:

  • The GEC RF Reference Cell remains a vital standardized tool for advancing the field of gaseous electronics.
  • Continued research and design evolution of the GEC Cell will further enhance understanding of plasma phenomena.
  • This work serves as a key reference for researchers in gaseous electronics and plasma science.