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    Area of Science:

    • Electrical Engineering
    • Acoustics
    • Materials Science

    Background:

    • Capacitive micromachined ultrasonic transducers (CMUTs) are crucial for various sensing applications.
    • Accurate modeling of CMUT behavior, especially under electrical charge, is essential for performance optimization.
    • Existing models may not fully capture the energy dynamics of charged CMUT cells.

    Purpose of the Study:

    • To derive and present an energy-consistent lumped-element equivalent circuit model for a charged circular CMUT cell.
    • To analytically and experimentally demonstrate the sufficiency of a series DC voltage source for modeling CMUT charging.
    • To develop a model-based method for determining the charging potential from impedance measurements.

    Main Methods:

    • Derivation of an energy-consistent lumped-element equivalent circuit model.
    • Analytical derivation and experimental verification of the DC voltage source model.
    • Development of a model-based method using impedance measurements at low bias voltages.
    • Experimental validation using an airborne CMUT resonating at 103 kHz.

    Main Results:

    • An energy-consistent lumped-element equivalent circuit model for charged CMUTs was successfully derived.
    • It was analytically and experimentally confirmed that a series DC voltage source adequately models CMUT charging.
    • A method to determine the charging potential from impedance measurements was presented and validated.
    • Experimental data (impedance, reception, transient response) closely matched model predictions.

    Conclusions:

    • The proposed equivalent circuit model provides an accurate and energy-consistent representation of charged CMUT cells.
    • The inclusion of a series DC voltage source is a validated simplification for modeling CMUT charging.
    • The model facilitates the determination of CMUT parameters from electrical measurements, enhancing design and analysis capabilities.