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Updated: Feb 16, 2026
16:05
Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
Published on: October 1, 2007
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Integrated Temperature and Hydrogen Sensors with MEMS Technology.
Hongchuan Jiang1, Min Huang2, Yibing Yu3
1State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China. hcjiang@uestc.edu.cn.
Sensors (Basel, Switzerland)
|January 6, 2018
Summary
A novel micro-electro-mechanical system (MEMS) fabricated sensor integrates palladium-nickel (PdNi) thin film for hydrogen detection and platinum (Pt) thin film for temperature sensing. This design effectively compensates for temperature variations, enhancing hydrogen sensor accuracy and reliability.
Area of Science:
- Materials Science and Engineering
- Sensor Technology
- Micro-electro-mechanical Systems (MEMS)
Background:
- Accurate hydrogen gas sensing is critical for safety and industrial applications.
- Temperature fluctuations significantly impact the performance of hydrogen gas sensors.
- Existing sensors often require complex calibration or external temperature compensation.
Purpose of the Study:
- To design and fabricate an integrated hydrogen gas sensor with in-situ temperature compensation.
- To evaluate the performance of a palladium-nickel (PdNi) thin film hydrogen sensor.
- To utilize a platinum (Pt) thin film resistor for accurate temperature measurement and compensation.
Main Methods:
- Fabrication of a MEMS-based sensor featuring a PdNi thin film sensing element and a Pt thin film temperature sensing element.
- Measurement of the temperature coefficient of resistance (TCR) for both PdNi (0.00122/K) and Pt (0.00217/K) films.
- Deposition of a silicon nitride (SiN) layer to prevent hydrogen diffusion and protect the temperature sensor.
- Calibration and performance testing of the PdNi hydrogen sensor across various hydrogen concentrations (0.3%–3%) and temperatures (294.7–302.2 K).
Main Results:
- The integrated sensor successfully utilized the Pt resistor's temperature data to calibrate the PdNi hydrogen sensor's response.
- Temperature compensation significantly reduced the impact of temperature variations on hydrogen sensing performance.
- The PdNi sensor exhibited increased output response with higher hydrogen concentrations and decreased response/recovery times.
- The sensor demonstrated excellent repeatability in cycling tests between nitrogen and 3% hydrogen at 313 K.
Conclusions:
- The developed MEMS-based integrated PdNi thin film hydrogen sensor with Pt temperature compensation offers improved accuracy and reliability.
- This approach effectively mitigates temperature-induced errors in hydrogen gas detection.
- The sensor shows potential for practical applications requiring precise and stable hydrogen monitoring.
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