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Related Experiment Video

Updated: Feb 14, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters.

Hasan Goktas1

  • 1Department of Electrical and Electronic Engineering, Harran University; hgoktas.gwu@gmail.com.

Journal of Visualized Experiments : Jove
|February 15, 2018
PubMed
Summary

Laser Doppler vibrometry (LDV) offers superior MEMS filter characterization compared to network analyzers. New methods improve tuning by 32% and prevent stiction without extra heating.

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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Vibrometry
  • Sensor Technology

Background:

  • Conventional network analyzers have limitations in characterizing microelectromechanical systems (MEMS) devices.
  • Laser Doppler vibrometry (LDV) offers enhanced capabilities for MEMS analysis, including higher mode detection and resonance measurement for small devices.

Purpose of the Study:

  • To demonstrate the advantages of LDV over conventional techniques for MEMS filter characterization.
  • To present techniques for creating application-based MEMS filters with improved tuning and methods to avoid device failure and stiction.

Main Methods:

  • Utilized laser Doppler vibrometry (LDV) to characterize frequency tuning range and resonance frequency of MEMS filters.
  • Employed Joule heating from embedded heaters for frequency tuning, analyzing thermal stress effects.
  • Investigated the impact of increased DC bias voltage on tuning capability.
  • Developed a low-frequency square wave signal application to mitigate stiction.

Main Results:

  • LDV enabled crucial measurements not possible with network analyzers, such as higher mode detection and resonance measurement for micro-scale devices.
  • Achieved a 32% increase in tuning capability by raising DC bias voltage (25 V to 35 V), eliminating the need for additional Joule heating.
  • Demonstrated a simple square wave signal technique to effectively separate beams and prevent stiction, avoiding complex methods.

Conclusions:

  • LDV is a powerful tool for advanced MEMS filter characterization and prototyping.
  • Optimized MEMS filter tuning through electrical bias, enhancing performance and reducing thermal stress issues.
  • A novel, simple method effectively addresses stiction in MEMS devices, improving reliability and manufacturability.